VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Germanium: Ge(3d5) & Ge(3d3),BE Cu(2p3)= 932.69 eV
1
0.05 eV/step, Sum of 20 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 20 repetitive etch/scans
Germanium: Ge(3d5) & Ge(3d3),BE Cu(2p3)= 932.69 eV
2003
4
28
23
19
22
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.3
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
40
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
60
4.00E-06
0
0
0
0
802
71
4901
0.369283
0.371827
384
0.371827
321
0.37182
357
0.371814
362
0.371808
366
0.371801
324
0.371795
355
0.371788
356
0.371782
378
0.371775
351
0.371769
325
0.371763
353
0.371756
325
0.37175
334
0.371743
331
0.371737
340
0.371731
344
0.371724
343
0.371718
331
0.371711
380
0.371705
307
0.371698
327
0.371692
333
0.371686
301
0.371679
306
0.371673
301
0.371666
341
0.37166
294
0.371653
315
0.371647
293
0.371641
340
0.371634
296
0.371628
298
0.371621
311
0.371615
279
0.371609
306
0.371602
302
0.371596
285
0.371589
294
0.371583
302
0.371577
308
0.37157
308
0.371564
324
0.371557
312
0.371551
328
0.371544
317
0.371538
303
0.371532
301
0.371525
291
0.371519
291
0.371512
269
0.371506
282
0.3715
275
0.371493
303
0.371487
276
0.37148
279
0.371474
248
0.371468
297
0.371461
268
0.371455
269
0.371448
287
0.371442
263
0.371436
272
0.371429
273
0.371423
301
0.371416
274
0.37141
262
0.371403
294
0.371397
279
0.371391
234
0.371384
244
0.371378
237
0.371371
251
0.371365
268
0.371359
257
0.371352
251
0.371346
281
0.371339
259
0.371333
295
0.371327
315
0.37132
277
0.371314
272
0.371307
288
0.371301
284
0.371295
273
0.371288
270
0.371282
268
0.371275
318
0.371269
301
0.371263
273
0.371256
251
0.37125
284
0.371243
292
0.371237
272
0.371231
272
0.371224
270
0.371218
269
0.371212
252
0.371205
250
0.371199
301
0.371192
280
0.371186
255
0.37118
280
0.371173
278
0.371167
254
0.37116
248
0.371154
273
0.371148
287
0.371141
268
0.371135
275
0.371128
279
0.371122
267
0.371116
262
0.371109
262
0.371103
264
0.371096
258
0.37109
254
0.371084
277
0.371077
252
0.371071
254
0.371065
258
0.371058
275
0.371052
253
0.371045
305
0.371039
244
0.371033
262
0.371026
269
0.37102
287
0.371013
267
0.371007
244
0.371001
252
0.370994
280
0.370988
273
0.370982
236
0.370975
312
0.370969
267
0.370962
263
0.370956
280
0.37095
259
0.370943
279
0.370937
257
0.37093
266
0.370924
263
0.370918
280
0.370911
254
0.370905
292
0.370899
263
0.370892
292
0.370886
252
0.370879
263
0.370873
258
0.370867
241
0.37086
250
0.370854
279
0.370848
252
0.370841
293
0.370835
239
0.370828
272
0.370822
244
0.370816
284
0.370809
253
0.370803
243
0.370797
275
0.37079
259
0.370784
284
0.370777
295
0.370771
267
0.370765
288
0.370758
276
0.370752
242
0.370746
285
0.370739
274
0.370733
295
0.370727
274
0.37072
275
0.370714
276
0.370707
287
0.370701
318
0.370695
305
0.370688
322
0.370682
304
0.370676
370
0.370669
315
0.370663
306
0.370656
332
0.37065
338
0.370644
370
0.370637
373
0.370631
392
0.370625
427
0.370618
475
0.370612
499
0.370606
513
0.370599
582
0.370593
675
0.370586
841
0.37058
874
0.370574
1143
0.370567
1412
0.370561
1741
0.370555
2075
0.370548
2443
0.370542
2745
0.370536
3156
0.370529
3540
0.370523
3688
0.370517
3824
0.37051
4014
0.370504
3895
0.370497
3881
0.370491
3975
0.370485
4128
0.370478
4141
0.370472
4390
0.370466
4539
0.370459
4762
0.370453
4817
0.370447
4901
0.37044
4794
0.370434
4588
0.370428
4257
0.370421
3763
0.370415
3286
0.370408
2693
0.370402
2280
0.370396
1746
0.370389
1419
0.370383
1090
0.370377
898
0.37037
682
0.370364
601
0.370358
518
0.370351
396
0.370345
339
0.370339
300
0.370332
272
0.370326
249
0.37032
234
0.370313
239
0.370307
204
0.370301
198
0.370294
208
0.370288
179
0.370281
188
0.370275
177
0.370269
144
0.370262
167
0.370256
146
0.37025
157
0.370243
138
0.370237
166
0.370231
159
0.370224
153
0.370218
144
0.370212
153
0.370205
137
0.370199
138
0.370193
142
0.370186
159
0.37018
142
0.370174
155
0.370167
143
0.370161
112
0.370155
114
0.370148
124
0.370142
135
0.370136
127
0.370129
109
0.370123
145
0.370117
127
0.37011
131
0.370104
139
0.370098
131
0.370091
126
0.370085
115
0.370079
129
0.370072
110
0.370066
121
0.37006
122
0.370053
111
0.370047
115
0.370041
157
0.370034
112
0.370028
106
0.370022
123
0.370015
98
0.370009
103
0.370003
99
0.369996
122
0.36999
117
0.369984
127
0.369977
107
0.369971
101
0.369965
109
0.369958
110
0.369952
114
0.369946
124
0.369939
119
0.369933
106
0.369927
106
0.36992
120
0.369914
123
0.369908
124
0.369901
96
0.369895
91
0.369889
126
0.369882
82
0.369876
108
0.36987
114
0.369863
119
0.369857
120
0.369851
100
0.369844
97
0.369838
95
0.369832
116
0.369825
101
0.369819
110
0.369813
106
0.369806
120
0.3698
115
0.369794
104
0.369787
118
0.369781
107
0.369775
114
0.369769
116
0.369762
113
0.369756
115
0.36975
104
0.369743
128
0.369737
117
0.369731
125
0.369724
115
0.369718
131
0.369712
113
0.369705
120
0.369699
112
0.369693
131
0.369686
133
0.36968
126
0.369674
122
0.369667
119
0.369661
111
0.369655
118
0.369649
121
0.369642
132
0.369636
124
0.36963
119
0.369623
117
0.369617
118
0.369611
140
0.369604
120
0.369598
122
0.369592
117
0.369585
105
0.369579
103
0.369573
137
0.369566
126
0.36956
98
0.369554
95
0.369548
119
0.369541
100
0.369535
112
0.369529
110
0.369522
120
0.369516
100
0.36951
96
0.369503
114
0.369497
119
0.369491
96
0.369484
111
0.369478
106
0.369472
98
0.369466
115
0.369459
93
0.369453
106
0.369447
107
0.36944
95
0.369434
101
0.369428
120
0.369421
104
0.369415
112
0.369409
99
0.369403
92
0.369396
100
0.36939
115
0.369384
107
0.369377
103
0.369371
109
0.369365
113
0.369358
104
0.369352
107
0.369346
93
0.36934
108
0.369333
120
0.369327
71
0.369321
102
0.369314
108
0.369308
91
0.369302
102
0.369295
92
0.369289
105
0.369283
end of experiment
